Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces
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چکیده
منابع مشابه
Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces
Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD) plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF) is one of the most effective meth...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2013
ISSN: 2072-666X
DOI: 10.3390/mi4010067